Do this:
1. PMMA spin-coat and bake
2. Apply 100 Angstroms Aluminum by thermal evaporation
3. EBL writing
4. Strip Al in KOH
5. Develop patterns in MIBK or MIBK:IPA mixture
6. Apply metal
The Al at only 100A should not effect the dose requirement for EBL. I use
this procedure very frequently.
Hope this helps,
Bill
-----Original Message-----
From: mems-talk-bounces@memsnet.org
[mailto:mems-talk-bounces@memsnet.org]On Behalf Of Lee, Duhyun
Sent: Monday, November 01, 2004 5:46 PM
To: mems-talk@memsnet.org
Subject: [mems-talk] EBL on insulator
Dear MEMS talkers,
I'm new in e-beam lithography(EBL) and looking for the way to make patterns
on quartz wafer.
The process what I want to do is
1. PMMA coating on bare quartz
2. EBL
3. metal lift-off
The problem is the EBL. I have to focus on the quratz wafer and draw
sub-micron pattern.
Due to the charge-up, I cannot do anything.
Please advice me
Lee, Duhyun
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