High etch rate of silicon using Dry etching method
Brent Garber
2005-08-30
Harshal,
I would think any RIE system would etch Si. You can start with SF6 for fast
etching.
Brent
harshal rokade wrote:
> Hi,
>
> We have STS's PC 320 RIE system. i am interested in knowing, is it posible to
etch silicon using this system with very high etch rate may be around 20um/min.
which gases will be reqiiured?