poor adhesion of vacuum deposited metals on sapphire
Jauniskis, Linas
2006-04-12
Hello All,
I tried my metallization recipe that shows good adhesion on glass
(e-beam 500A Ti, 1000A Ni, 500A Au; 200C dep temperature; solvent clean
only of substrates) on sapphire, and it peels right off the sapphire
(had good adhesion on witness glass in the same run).
Could anyone provide insight on the disparate behavior between glass and
sapphire and how to get good adhesion on sapphire.
Did some literature search and found only a reference to good adhesion
of Ti on sapphire by ebeam.
Much thanks in advance!
Linas.