poor adhesion of vacuum deposited metals on sapphire
Kirt Williams
2006-04-12
Linas--
I've used the same metal system on sapphire with adhesion good enough to get
a vacuum-tight solder seal.
The difference from your situation was that I used an ion mill to briefly
sputter-clean the sapphire surface, then, without breaking vacuum, used the
ion mill to sputter-deposit the three metals.
I'll toss out cleanliness of your sapphire as a potential problem. You might
go a step further than solvent cleaning and use a Piranha clean on the
sapphire.
(BTW, just about nothing etches sapphire, so most any cleaning solution you
can think of will be compatible.)
--Kirt Williams
----- Original Message -----
From: "Jauniskis, Linas"
To:
Sent: Wednesday, April 12, 2006 11:50 AM
Subject: [mems-talk] poor adhesion of vacuum deposited metals on sapphire
>
> Hello All,
>
> I tried my metallization recipe that shows good adhesion on glass
> (e-beam 500A Ti, 1000A Ni, 500A Au; 200C dep temperature; solvent clean
> only of substrates) on sapphire, and it peels right off the sapphire
> (had good adhesion on witness glass in the same run).
>
> Could anyone provide insight on the disparate behavior between glass and
> sapphire and how to get good adhesion on sapphire.
>
> Did some literature search and found only a reference to good adhesion
> of Ti on sapphire by ebeam.
>