Hi All,
I'm planning to do copper etching on micro features (the copper will be
approximately 2um in thickness, 20um in width and 200um in length).
For some reason, I must use sulfuric-peroxide etchant. Can anyone recommend
me some commercialized etchant (sulfuric-peroxide)
for micro copper etching? I tried Fisher and Transene, but didn't find any.
BTW, generally, it is a mixture of 96% sulfuric and 30% hydrogen peroxide
with some stablizers. It will also be very helpful if someone
can give me a clue on what kind of stablizers I should use, so that I can
make the etchant myself.
Thanks a lot and your help will be highly appreciated.
Best Regards,
Yi