At first: Thank you very much for your kind mail Mr. Kaplan.
As the matter of fact, I had done like your suggestion before
sending my former message, and the sealing was very good, but the
electrode was not active anymore. I tried to etch the Ti layer on
active Au area, but PDMS did not work very well as "mask" and I had
lost the control over electro's active area again, by under-etching.
By its turn, any solution involving alignment is forbidden, since in
my process I have no chance to settle PDMS channels over the glass
plate with that great precision.
I have a trouble! ...[8^)
Thank you again!
NH
From: "shay kaplan"
To: "'General MEMS discussion'"
Date: Fri, 22 Jun 2007 09:18:48 +0300
Subject: RE: [mems-talk] PDMS Sealing over Au?!
Can you evaporate ti or cr over the gold in the crossing area?