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MEMSnet Home: MEMS-Talk: Problem with DC Sputter
Problem with DC Sputter
2007-08-02
saravan kallempudi
2007-08-02
Brent Garber
2007-08-02
Jim
2007-08-02
Birol Kuyel
Problem with DC Sputter
saravan kallempudi
2007-08-02
Dear Members,

I have a problem with my DC sputter. We used to sputter Nickel but we have
strange problem now having plasma inside chamber but unable to sputter nickel. I
thought of target poisoning and I cleaned the target with Nitricacid and then
also I was not able to move forward. Can anyone suggest me in this!
Thanks in Advance,

Kallempudi Sreenivasa Saravan

PhD student, Electronics Engineering,
1054, FENS, Sabanci University,
Orhanli, 34956,
Tuzla, Istanbul, Turkey.
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