I may miss some comments. You can use SU-8 3000 for coating glass with better
adhesion result. If you have to use SU-8 2000 products, try clean substrate
surface with oxygen plasma or Piranha solution, dry it with a hot plate and
increase the exposure time.
Jian Wang
Senior Scientist
Flexcell International
"Yue Mun Pun, Jeffrey" wrote:
Hi,
I am using SU-8 2000 series and may need to use it on glass wafers. Can anyone
suggest how I can make SU-8 adhere to glass, whether I need to spin coat
Omnicoat or treat the glass with oxygen plasma?
Also, how do I dice the glass wafers? I have tried using a manual diamond
scriber but it does not cut the glass in straight lines.