Hi Jeffrey,
I agree with Silvan. I also use a similar process to coat SU-8 on glass.
Dehydration bake at 140 C for 2-3 hours works well, you might not need O2 plasma
for cleaning the wafer.
Satya
----- Original Message -----
From: Silvan Schmid
To: General MEMS discussion
Sent: Monday, October 08, 2007 7:40 PM
Subject: Re: [mems-talk] SU-8 on glass
Dear Jeffrey,
if you clean the glass wafer with an oxygen plasma before you spin on
the SU-8, adhesion should not be an issue. Make sure that you get rid of
all water molecules on the glass surface. If you do not have a plasma,
at least perform a dry bake before applying the SU-8.
I recommend to cut the glass wafer with a wafer saw.
Regards,
Silvan
Yue Mun Pun, Jeffrey schrieb:
> Hi,
> I am using SU-8 2000 series and may need to use it on glass wafers. Can
anyone suggest how I can make SU-8 adhere to glass, whether I need to spin coat
Omnicoat or treat the glass with oxygen plasma?
> Also, how do I dice the glass wafers? I have tried using a manual diamond
scriber but it does not cut the glass in straight lines.