How to remove AZ photoresist in SU-8 microchannel?
K.P.Nichols@utwente.nl
2008-01-31
KOH will cause your SU-8 to peel off.
- Kevin Nichols
-----Original Message-----
From: mems-talk-bounces@memsnet.org on behalf of jpt sharma
Sent: Wed 1/30/2008 11:05 PM
To: General MEMS discussion
Subject: Re: [mems-talk] How to remove AZ photoresist in SU-8 microchannel?
Hi
KOH solution can remove AZ 5214 but I am not sure what it does with SU-8.
Thanks