Lift-off method for ALD deposited Al2O3 with PMMA
pattern
Jun Huang
2008-08-29
Hi, all,
The structure of our device composed of silicon/Patterned PMMA(~200
nm)/ALD Al2O3 (~40 nm). I have tried to dip the device in acetone to do
lift-off but the Al2O3 layer on the entire substrate surface does not
lift-off. It seems that either acetone can not penetrate the Al2O3 layer or
the PMMA layer is hardened. The deposition temperature for ALD Al2O3 is ~
150 C which should not be high enough to harden PMMA.
Does anyone have any suggestions on the lift-off process?
Thanks a lot.
Best regards,
Jun