PMMA-950K-A6 resist peeling problem after Ni-Au
deposition
basar bolukbas
2009-01-20
Hello,
I am trying to deposite Ni-Au metal layers (500A-3500A) to PMMA-950K-A6 resist
but
after every deposition, i observed some resist/metal peeling problem.
This bubble like structures trigger the removing of the metal layers.
Do you have any suggestion or solution about this problem?
Thank you for your answers.