PMMA-950K-A6 resist peeling problem after Ni-Au
deposition
basar bolukbas
2009-01-25
Dear Ananth,
I appreciate your help.
1. Yes we have oven, and i will try your suggestions as soon as possible.
2. Is this post bake condition damage to futures? (future size is 300nm.)
3. I make deposition step by step like your suggestion.
Exm: 500A deposition - 5min cooling time (rate:3A/sec.)
I think these conditions are not enough for cooling of samples?
Best regards.