Try silane treatment before deposition.
shay
-----Original Message-----
From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org]
On Behalf Of Reza Rashidi
Sent: Wednesday, September 30, 2009 4:46 AM
To: mems talk
Subject: [mems-talk] parylene adhesion on Silicon
Hi,
I have a silicon wafer with a 5 um parylene on it which is a chemical
protector. The package will operate at 170C and up to 300 psi in a basic
solution. Due to poor adhesion of parylene, the liquid penetrates under the
parylene film. I am wondering how I can increase the adhesion.
Your advise will be appreciated.
Thnaks,
Reza