If you are not using adhesion promoter get some A-174. That said you may have
problems with any polymer adhesion to silicon in a basic solution. For example,
5% KOH in DI works well to strip nearly any polymer from a silicon surface. It
is really handy for stripping negative resist.
Good luck,
Michael
>>> Reza Rashidi 9/29/2009 10:45 PM >>>
Hi,
I have a silicon wafer with a 5 um parylene on it which is a chemical protector.
The package will operate at 170C and up to 300 psi in a basic solution. Due to
poor adhesion of parylene, the liquid penetrates under the parylene film. I am
wondering how I can increase the adhesion.
Your advise will be appreciated.
Thnaks,
Reza