Hello,
How about deep dry etch (like BOSCH process) using thick photoresist AZ 4562. Of
course this
is assuming you have access to the facilty. I used to get 1 mm dia hole on 500
um thick silicon wafers.
Best regards,
Shimul
--- On Mon, 6/12/10, Xiaohui Lin wrote:
From: Xiaohui Lin
Subject: Re: [mems-talk] how to drill a hole in a silicon wafer
To: "General MEMS discussion"
Date: Monday, 6 December, 2010, 4:25 AM
ultra sonic drilling can be use to drill 1mm hole on wafers