You should use cyclopentanone (CP) for dilution of the SU-8 2000 series. IPA is
actually not compatible as a diluent for this material.
Mike
-----Original Message-----
From: mems-talk-bounces+mstan=microchem.com@memsnet.org [mailto:mems-talk-
bounces+mstan=microchem.com@memsnet.org] On Behalf Of 첸로
Sent: Wednesday, April 20, 2011 7:10 AM
To: mems-talk
Subject: [mems-talk] dilute SU-8 2075
Dear everyone,
I am using SU-8 2075 in photolithography. I want to get a thin film after spin
coating so i intend to use IPA to dilute su-8, but it does not work. Has anybody
encountered this problem? How do you dilute the su-8?
Any suggestion will be highly appreciated.
Thanks in advance.
Regards