You can also try thermal band. It has got two similar side with a adhesion
future. First you put it on your carrier. Then you remove protective coating on
front side, so now you can put/stick your wafer on it. It has got very good
thermal conductivity. As it will be smaller than your wafer, it will not react
with your plasma, and you will not have a micromasking or contamination problem.
After your etching process, put your carrier with your wafer on a hotplate @ 80C
for a minute. Than you can easily remove your wafer from carrier. No residues no
cleaning problems. :)
> From: firstname.lastname@example.org
> Date: Wed, 5 Dec 2012 10:36:21 -0500
> To: email@example.com
> Subject: [mems-talk] Adhesive to bond onto a carrier wafer for etching
> Hello all,
> I need to mount a 4" silicon wafer on a 6" metallized carrier wafer, in
> order to etch it in a Alcatel deep-reactive ion etcher. I am wondering if
> someone has used thermal vacuum grease for this purpose that can be removed
> easily at the end. The silicon wafer is patterned with photoresist and has
> no other material on it.
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