Why not just use the photoresist? It works well for me.
2012/12/5 Shree Narayanan :
> Hello all,
> I need to mount a 4" silicon wafer on a 6" metallized carrier wafer, in
> order to etch it in a Alcatel deep-reactive ion etcher. I am wondering if
> someone has used thermal vacuum grease for this purpose that can be removed
> easily at the end. The silicon wafer is patterned with photoresist and has
> no other material on it.
> Hosted by the MEMS and Nanotechnology Exchange, the country's leading
> provider of MEMS and Nanotechnology design and fabrication services.
> Visit us at http://www.mems-exchange.org
> Want to advertise to this community? See http://www.memsnet.org
> To unsubscribe:
Assistant Professor, Dr
MIC - Department of Micro and Nanotechnology
Technical University of Denmark (DTU)
Building 344, 1st floor, Room no. 130
DK-2800, Kgs. Lyngby
Tel: +45 4525 6311
Fax: +45 4588 7762
Hosted by the MEMS and Nanotechnology Exchange, the country's leading
provider of MEMS and Nanotechnology design and fabrication services.
Visit us at http://www.mems-exchange.org
Want to advertise to this community? See http://www.memsnet.org