Hello,
I'm doing single layer SU8 2005, thickness ~6-7um. I use 60mJ/cm^-2 on sputtered
gold surface. But somehow sometimes I notice that the edges of my pattern
darkens, I suspect it's due to overexposed. But 60mJ is quite a low dose
compared to the recommended one. I would appreciate any comments given. Thank
you.
Best Regards,
Jocelyn
Sent from my iPhone
_______________________________________________
Hosted by the MEMS and Nanotechnology Exchange, the country's leading
provider of MEMS and Nanotechnology design and fabrication services.
Visit us at http://www.mems-exchange.org
Want to advertise to this community? See http://www.memsnet.org
To unsubscribe:
http://mail.mems-exchange.org/mailman/listinfo/mems-talk