Hi,
Does anyone have experience with LOR3A (w/ 1827) on borosilicate glass. The
processing parameters, i.e. undercut rate after a 6 min 150C bake, appear quite
different than those for silicon. That is, I am seeing a much lower undercut
rate for the borosilicate than for silicon.
Thank you,
Michael
_______________________________________________
Hosted by the MEMS and Nanotechnology Exchange, the country's leading
provider of MEMS and Nanotechnology design and fabrication services.
Visit us at http://www.mems-exchange.org
Want to advertise to this community? See http://www.memsnet.org
To unsubscribe:
http://mail.mems-exchange.org/mailman/listinfo/mems-talk