I had similar problems when coating thick layers of SU8 on soda lime
glass. Be careful when removing the substrate from the hotplate at 95
degrees as thermal shocks cracks the SU8 unbonding it from the glass.
The parameters that you use for soft bake sugests that you are coating a
thin layer of SU8. ( Less than 10 microns). I haven't got this problem
with thin layers.
Maybe You should check how long you leave it on the hotplate, I ussually
have it for longer times than those you posted.
You can also try more exposure time. It may spoil the patterns but you can
check if it works...
El 10/03/2014 20:40, "Janis Klavins" escribió:
> Hello everybody,
> I am trying to coat an SU8 material on ITO etched glass. I have a problem
> that during development the SU8 lifts off the glass very easily. if the
> glass sheet is immersed in the developer the SU8 lifts off and floats away.
> I believe that this is a baking problem (too much or not enough) after
> coating the SU8. I am using a two step kiln 65 degrees ( 1 min) and 95
> degrees (4 min). The same settings for post exposure bake.
> Has anyone seen a problem like this?
> Best regards,
> Mr. Janis Klavins
> Phone: +37163600300
> Mobile: +37126141049
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