Re: How to measure the static friction coefficient between
Dr. Matthias Scherge
1999-02-18
polisilicon layers?
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>Hello:
>How to measure the static friction coefficient between polysilicon
>layers?
>Thanks a lot.
By taking a micro tribometer, if low forces are under consideration.
Have a look at out web pages.
Best Regards,
Matt
Dr. Matthias Scherge
Microtribology Group
Technische Universitaet Ilmenau
PF 100565
D-98684 Ilmenau
Tel +49 3677 693782
Fax +49 3677 693771
ttp://imath.mathematik.tu-ilmenau.de/phys/personal/tribo.html