Re: How to measure the static friction coefficient between
Uthara Srinivasan
1999-02-18
polisilicon layers?
Hello,
There is a paper by Martin Lim and coworkers on this topic, and a paper by
me and coworkers in Transducers '97 which use micromachined test
structures to test static friction coefficients between polysilicon
surfaces.
good luck,
Uthara Srinivasan