I need to bond Pyrex to both sides of a silicon wafer. One of the pieces
of Pyrex is a full 4 inch diameter wafer (same as Si wafer) with a
thickness of 0.5 inches. This is used as the base for a flow cell etched
into the wafer. The other piece of Pyrex is a cover slip for microscopy
work so it is only 0.13 mm in thickness and a 50mm square.
Has anyone ever anodically bonded pyrex to both sides? All the literature
I read only describes the process for one side.
Thank you,
Connie Smith
Department of Chemical Engineering
Rice University
6100 Main MS 362
Houston, TX 77005
Phone 713-348-3507
Fax 713-348-5478