Hello, folks
I am doing piezoresistor simulation in MEMS using the program ANSYS. Do you
have some clues about what kind of couple-field element in Ansys can account
for the interaction between displacement of element ( the displacemetn induces
stress and stress induces strain of element then), and the change of its
resistivity. The piezoelectric element only reflects how structural
displacement affect voltage distribution.
Thanks
Yanjun Tang
Louisiana Tech Univeristy