I had a similar situation with unique dicing requirements, and I ended
up speaking to Irene Miller at Thermocarbon, Inc. (800)523-1946.  She
was very helpful in recommending the proper blades for the job.

Hope this helps.

-----Original Message-----
From: mems-talk-bounces@memsnet.org
[mailto:mems-talk-bounces@memsnet.org] On Behalf Of Cormac Eason
Sent: Tuesday, January 07, 2003 10:30 AM
To: mems-talk@memsnet.org
Subject: [mems-talk] Dicing Saw Blades


Hi all,

Could anyone recommend a dicing saw blade or blades suitable for cutting
the following combinations of materials:

Silicon (0.5mm thick) anodically bonded to Pyrex (0.5mm thick)

Pyrex (0.5mm thick) spin coated with a 5 micron layer of SU 8

Silicon (0.5mm), with an electroplated Copper layer (0.4mm), topped with
a 5 micron thick SU 8 layer and a 0.5mm Pyrex layer.

Thicknesses are approximate at the moment, but the maximum depth to
which I'll be cutting will be < 1.5mm

The thickness of the blade doesn't matter to me as there is plenty of
room between samples, though the more vertical the cut edges are the
better. Thanks in advance for all assistance.
--

Regards,
Cormac Eason


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