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MEMSnet Home: MEMS-Talk: rotary mechanical feedthrus
rotary mechanical feedthrus
2003-01-24
Thomas B. Jones
2003-01-29
David Nemeth
2003-01-24
Michael Yakimov
2003-01-24
Bill Moffat
rotary mechanical feedthrus
Thomas B. Jones
2003-01-24
Can anyone tell me if there are good rotary mechanical feedthrus available
that are suitable for vacuum evaporation stations?  We are considering a
shutter system for multiple metallization and think the most flexible
arrangement for our particular setup might be to mount the shutter inside
on shaft of the feedthru, and  then turn it back and forth manually.

I believe there are (or were) some components made by Ferrofluidics in the
Boston area, but wonder if they are the cheapest and most appropriate for
our type of vacuum system.   Thanks in advance for any suggestions.

T. B. Jones


________________________________________________________
Thomas B. Jones
Professor of Electrical Engineering
University of Rochester
P.O. Box 270126
Rochester, NY  14627-0126    (USA)
phone: 1-585-275-5233   fax: 1-585-273-4919
email: [email protected]
http://www.ece.rochester.edu/~jones
________________________________________________________



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