Thomas,
        I was going to mention ferrofluidics.  We used them for rotary feed
through to drive a turntable inside a vacuum oven.  We were happy with the
performance, if it becomes a more serious question let me know I can ask my
engineers for their input on operation of this type of feed through.  Bill
Moffat

-----Original Message-----
From: Thomas B. Jones [mailto:[email protected]]
Sent: Friday, January 24, 2003 5:24 AM
To: MEMS listserve
Subject: [mems-talk] rotary mechanical feedthrus


Can anyone tell me if there are good rotary mechanical feedthrus available
that are suitable for vacuum evaporation stations?  We are considering a
shutter system for multiple metallization and think the most flexible
arrangement for our particular setup might be to mount the shutter inside
on shaft of the feedthru, and  then turn it back and forth manually.

I believe there are (or were) some components made by Ferrofluidics in the
Boston area, but wonder if they are the cheapest and most appropriate for
our type of vacuum system.   Thanks in advance for any suggestions.

T. B. Jones


________________________________________________________
Thomas B. Jones
Professor of Electrical Engineering
University of Rochester
P.O. Box 270126
Rochester, NY  14627-0126    (USA)
phone: 1-585-275-5233   fax: 1-585-273-4919
email: [email protected]
http://www.ece.rochester.edu/~jones
________________________________________________________



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