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MEMSnet Home: MEMS-Talk: Cr/Si interface.
Cr/Si interface.
2003-03-11
Hong Wu
2003-03-14
Brent Garber
2003-03-14
Hong Wu
Cr/Si interface.
Hong Wu
2003-03-11
Hi,
        I am going to deposit Cr to Si substrate to form metal contact. I am
concerned the native SiO2 on the interface would make high contact
resistance if I use evaporating. Do I have to concerned?

Hong Wu



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