Wu,

I would need to know what kind of contact you want.  Cr makes great
contact with Si when HF dipped and the Cr deposited as soon as
possible.  Being able to sputter etch the Si in the vacuum system before
deposition is best.  Are you working with bare Si?  Can you sputter Cr
instead of evaporate?

Brent
 garber@engr.uconn.edu