Patrick, that depends on the type and the brand of polyimide you use. This
information is found in the manufactures process sheet. I use archchemical
polyimides.
http://www.archmicro.com/products/dtlStress.asp

Kevin

-----Original Message-----
From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org]On
Behalf Of Patrick Carlberg
Sent: Tuesday, March 11, 2003 6:01 AM
To: mems-talk@memsnet.org
Subject: [mems-talk] Questions on Polyimide

Dear all,

Does anyone know the approximate thickness of Polyimide on Si spun at
3000rpm or the etching rate in O2-plasma.

Sincerely
Patrick Carlberg


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