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  • Pulsed IR source (asad ikram)
  • SU-8 recording at 400nm (suitto kk)
  • recipe for isotropic dry etch of Si (Qing Yao)
  • Small Tubes ([email protected])
  • SU-8 recording at 400nm (Jacques Jonsmann)
  • recipe for isotropic dry etch of Si (Xu Zhu)
  • SU-8 recording at 400nm (Christopher F. Blanford)
  • UV curable adhesive (lgovinda)
  • etch Si without attacking Ni (Qing Yao)
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Process Variations in Microsystems Manufacturing
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Mentor Graphics Corporation