For the first time, the NIST researchers have measured the transfer of motion through the contacting parts of a microelectromechanical system at nanometer and microradian scales. Their test system consisted of a two-part linkage, with the motion of one ...
SEMI FabView tracks spending and capacities of over 1,100 facilities, including over 60 future facilities, across industry segments from Analog, Power, Logic, MPU, Memory, and Foundry to MEMS and LED fabs. SEMI FabView features high-level fab data such as ...
Solid State Technology: 2016-09-13 - MEMS technology
To shrink the instrument, the research team incorporated a spectrometer chip made with micro-electro-mechanical systems, or MEMS, technology that has drastically reduced the size of spectrometers. This allowed the team to build the first research-grade ...
Micro-electromechanical system (MEMS) gyroscopes have advantages for orientation sensing and navigation as they are small, low cost and consume little power. However, the significant noise at low frequencies produces large orientation errors as a function ...
This paper reports on a flexible Ni micro wire with CNTs embedded into its surface. By using micromachining technology, for the first time, we could implant nanoscale materials into micro-scale metal substrate at room temperature. Thanks to the effective ...
