I presume you are looking at single crystal silicon.

Some references from the web, take them as you will
www.virginiasemi.com/pdf/Basic%20Mechanical%20and%20Thermal%20Properties%20o
f%20Silicon.doc
http://www.ioffe.rssi.ru/SVA/NSM/Semicond/Si/thermal.html

Here's an interesting one: it states that the isotopic composition of
silicon can have a big impact on the thermal conductivity.
It says Silicon 29 and silicon 30 atoms, which are non-radioactive and have
no impact on the electronic structure, can cause phonon scattering and
decrease the thermal conductivity significantly.  I'd imagine this would be
more important on the high resistivity (low doping) side of the spectrum.
http://www.isonics.com/Products/Semiconductors/FAQ.cfm

David Nemeth
Senior Engineer
Sophia Wireless, Inc.
14225-C Sullyfield Circle
Chantilly, VA
-----Original Message-----
From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org]On
Behalf Of BRIAND Danick
Sent: Wednesday, May 14, 2003 9:24 AM
To: General MEMS discussion
Subject: [mems-talk] thermal conductivity Si high and low Resistivity


Hello,
does someone have an idea on the thermal conductivity of highly resistive
silicon, 3000-10000 ohms*cm ? Highly doped ? I would like to know the
extreme values of the silicon thermal conductivity as a function of doping
concentration.
with my best regards
Danick Briand

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