A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: thermal conductivity Si high and low Resistivity
thermal conductivity Si high and low Resistivity
2003-05-14
BRIAND Danick
2003-05-14
David Nemeth
2003-05-14
BRIAND Danick
2003-05-14
Michael Yakimov
thermal conductivity Si high and low Resistivity
BRIAND Danick
2003-05-14
Dear MEMS group,
My question was not precise enough.
I have already found  some values on the web and in the handbooks about Silicon,
however these values are mostly at very low temperature, less than 100 K. If
some people know what is the effect of doping  on the thermal conductivity at
room temperature, is this a large effect from low resistivity 1 mohm*cm to high
resistivity 10000 ohms*cm ? At the end, I would like to have a silicon wafer
with the lowest thermal conductivity as possible and I am wondering if a highly
doped Si wafer would really make a big difference.
Thanks for your help
Danick

-
-----Original Message-----
From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org]On
Behalf Of BRIAND Danick
Sent: Wednesday, May 14, 2003 9:24 AM
To: General MEMS discussion
Subject: [mems-talk] thermal conductivity Si high and low Resistivity


Hello,
does someone have an idea on the thermal conductivity of highly resistive
silicon, 3000-10000 ohms*cm ? Highly doped ? I would like to know the
extreme values of the silicon thermal conductivity as a function of doping
concentration.
with my best regards
Danick Briand

_______________________________________________
MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list
options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
Hosted by the MEMS Exchange, providers of MEMS processing services.
Visit us at http://www.memsnet.org/


_______________________________________________
MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list
options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
Hosted by the MEMS Exchange, providers of MEMS processing services.
Visit us at http://www.memsnet.org/

reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
MEMS Technology Review
University Wafer
Nano-Master, Inc.
Mentor Graphics Corporation