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MEMSnet Home: MEMS-Talk: thermal conductivity Si high and low Resistivity
thermal conductivity Si high and low Resistivity
2003-05-14
BRIAND Danick
2003-05-14
David Nemeth
2003-05-14
BRIAND Danick
2003-05-14
Michael Yakimov
thermal conductivity Si high and low Resistivity
Michael Yakimov
2003-05-14
actually, there is some isotopically pure silicon  from  Isonics. Try to do
a web search if you are interested.. There were also some publications on
the subject, with full studies of temperature and composition dependances
thermal conductivity (I saw the reference on Isonics site someday)
Mike

> -----Original Message-----
> From: David Nemeth [SMTP:nemeth@sophiawireless.com]
> Sent: Wednesday, May 14, 2003 11:36
> To:   General MEMS discussion
> Subject:      RE: [mems-talk] thermal conductivity Si high and low
> Resistivity
>
> I presume you are looking at single crystal silicon.
>
> Some references from the web, take them as you will
> www.virginiasemi.com/pdf/Basic%20Mechanical%20and%20Thermal%20Properties%2
> 0o
> f%20Silicon.doc
> http://www.ioffe.rssi.ru/SVA/NSM/Semicond/Si/thermal.html
>
> Here's an interesting one: it states that the isotopic composition of
> silicon can have a big impact on the thermal conductivity.
> It says Silicon 29 and silicon 30 atoms, which are non-radioactive and
> have
> no impact on the electronic structure, can cause phonon scattering and
> decrease the thermal conductivity significantly.  I'd imagine this would
> be
> more important on the high resistivity (low doping) side of the spectrum.
> http://www.isonics.com/Products/Semiconductors/FAQ.cfm
>
> David Nemeth
> Senior Engineer
> Sophia Wireless, Inc.
> 14225-C Sullyfield Circle
> Chantilly, VA
> -----Original Message-----
> From: mems-talk-bounces@memsnet.org
> [mailto:mems-talk-bounces@memsnet.org]On
> Behalf Of BRIAND Danick
> Sent: Wednesday, May 14, 2003 9:24 AM
> To: General MEMS discussion
> Subject: [mems-talk] thermal conductivity Si high and low Resistivity
>
>
> Hello,
> does someone have an idea on the thermal conductivity of highly resistive
> silicon, 3000-10000 ohms*cm ? Highly doped ? I would like to know the
> extreme values of the silicon thermal conductivity as a function of doping
> concentration.
> with my best regards
> Danick Briand
>
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