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MEMSnet Home: MEMS-Talk: Tanks for KOH etching
Tanks for KOH etching
2003-08-07
Mark West
2003-08-07
beaton@npphotonics (Bill Eaton)
2003-08-07
Brubaker Chad
2003-08-11
Ertl, Stephan
Tanks for KOH etching
Mark West
2003-08-07
What is the preffered type of tank for KOH etching? Load is a single 25
wafer cassette of 4" wafers. temp range is 80 - 100 C.

Quartz is not compatible and plastic tanks are difficult to heat. Just
wondering if anyone has found a good product for this application.

M. W.
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