Food Service 304 stainless steel tanks work reasonably well. You can get
them from restaurant supply stores very easily. As an added bonus, they're
often fairly inexpensive.

Bill Eaton, Ph.D.
Materials, Analysis, and Test Manager
NP Photonics

> -----Original Message-----
> From: mems-talk-bounces+bille=solustech.com@memsnet.org
> [mailto:mems-talk-bounces+bille=solustech.com@memsnet.org]On Behalf Of
> Mark West
> Sent: Thursday, August 07, 2003 10:27 AM
> To: mems-talk@memsnet.org
> Subject: [mems-talk] Tanks for KOH etching
>
>
> What is the preffered type of tank for KOH etching? Load is a
> single 25
> wafer cassette of 4" wafers. temp range is 80 - 100 C.
>
> Quartz is not compatible and plastic tanks are difficult to heat. Just
> wondering if anyone has found a good product for this application.
>
> M. W.
> _______________________________________________
> MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list
> options, visit
http://mail.mems-exchange.org/mailman/listinfo/mems-talk
Hosted by the MEMS Exchange, providers of MEMS processing services.
Visit us at http://www.memsnet.org/