Hi all,

I see that in many of the MEMS applications the main
types of sensing are capacitive or impedance. In
sensing of humidity, I found it to be based on change
of capacitance because of water vapor. Also, in
majority of cases, capacitive sensing is followed in
accelerometers.

Can anybody tell me why capacitive sensing is used
more than resistive sensing? I might be wrong in this
but I have seen many sensors based on capacitance
change as the sensing parameter. Any literature, if
you can suggest, would be of a great help.

Thanks and regards.
Ramji Dhakal

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Ramji Dhakal

M S Mechanical Engineering,
SUNY Binghamton, NY

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