Hi Bill,
Thank you for your information. We have nitrogen plasma and Oxygen plasma
here, and I will try plasma treatment next time.
2009/2/10 Bill Moffat
> Experience to date with customers using YES plasma equipment for plasma
> bonding. The first is a company bonding silicon wafers to silicon
> wafers. For this they us about 10 minutes of Argon plasma and just
> place the plasma bonded surfaces next to each other and squeeze. The
> result is a silicon wafer twice as thick. The one I can quote because I
> did the plasma bonding for a customer in Norway is plasma bonding a
> flexible array that is a proprietary Dupont material to a super clean
> glass slide. The flexible array is a DNA well construction about 100
> holes down to the glass slide. The object is to glue the array to the
> glass slide without chemicals that would be a problem for the DNA
> solution. But no solution can make its way to another well. Because
> the flexible Dupont plastic had a problem with temperature and plasma
> raises the temperature I finished up with a 15 second plasma using Argon
> and just slapped the 2 surfaces together. An intimate weld. The
> company in Norway bought a plasma unit, and I have a slide on my desk
> that is 5 years old and the parts have not separated. In fact the slide
> has broken due to efforts to remove the flexible plastic but they are
> still stuck together. Hope this helps.
>
> Bill Moffat, CEO
> Yield Engineering Systems, Inc.