Hi to all,
I'm trying to replicate on PMMA sheet (1525 microns and 500microns) a
silicon master with circles whose dimensions are in the range between 100nm
to 400nm diameter (and 250nm height in all of them) with NIL.
My process is:
- Clean the silicon master during 15 minutes in Piranha (Can I do the same
with Plasma Cleaner? Is the same?I have a very simple Plasma with maximum
- Put the master in a desiccator with 100microliters of
Trichloro(1H,1H,2H,2H-perfluorooctyl)silane during 1 hour with simple
- NIL process: put the master and above I put the PMMA sheet with one
Teflon sheet and 3 aluminium sheets.
During 10 minutes with 50bar and 180ºC.
My problem is: The 100nm are not replicated and the PMMA sticks to the
master, and then the master gets dirty.
Can someone helps me to improve the process?
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