Thanks for the information, but send my samples to this company is very
expensive for us. But you say another option that you call ASL quemical,
what is this? where can I get it?
Thanks a lot.
2013/3/13 Tang Tian
> You need to apply anti-stiction layer on the master stamp prior to doing
> There is a company called Applied Micro Structures Inc (www.appliedmst.com)
> specializes in this and can do this for you. Otherwise you will need to
> spincoat ASL chemical yourself.
> Best Regards,
> Tian Tang
> EV Group
> invent • innovate • implement
> Applications Engineer - Direct: +1 (480) 305 2455, Main: +1 (480) 305 2400Fax:
> (480) 305 2401
> Cell: +1 (480) 274 3892
> E-Mail: T.Tang@EVGroup.com
> Web: www.EVGroup.com
> On Mar 13, 2013, at 8:43, Judith Linacero Blanco
> > Hi to all,
> > I'm trying to replicate on PMMA sheet (1525 microns and 500microns) a
> > silicon master with circles whose dimensions are in the range between
> > to 400nm diameter (and 250nm height in all of them) with NIL.
> > My process is:
> > - Clean the silicon master during 15 minutes in Piranha (Can I do the
> > with Plasma Cleaner? Is the same?I have a very simple Plasma with maximum
> > 20W. )
> > - Put the master in a desiccator with 100microliters of
> > Trichloro(1H,1H,2H,2H-perfluorooctyl)silane during 1 hour with simple
> > vaccum .
> > - NIL process: put the master and above I put the PMMA sheet with one
> > Teflon sheet and 3 aluminium sheets.
> > During 10 minutes with 50bar and 180ºC.
> > My problem is: The 100nm are not replicated and the PMMA sticks to the
> > master, and then the master gets dirty.
> > Can someone helps me to improve the process?
> Hosted by the MEMS and Nanotechnology Exchange, the country's leading
> provider of MEMS and Nanotechnology design and fabrication services.
> Visit us at http://www.mems-exchange.org
> Want to advertise to this community? See http://www.memsnet.org
> To unsubscribe:
Hosted by the MEMS and Nanotechnology Exchange, the country's leading
provider of MEMS and Nanotechnology design and fabrication services.
Visit us at http://www.mems-exchange.org
Want to advertise to this community? See http://www.memsnet.org