You need to apply anti-stiction layer on the master stamp prior to doing
There is a company called Applied Micro Structures Inc (www.appliedmst.com)
specializes in this and can do this for you. Otherwise you will need to
spincoat ASL chemical yourself.
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On Mar 13, 2013, at 8:43, Judith Linacero Blanco wrote:
> Hi to all,
> I'm trying to replicate on PMMA sheet (1525 microns and 500microns) a
> silicon master with circles whose dimensions are in the range between 100nm
> to 400nm diameter (and 250nm height in all of them) with NIL.
> My process is:
> - Clean the silicon master during 15 minutes in Piranha (Can I do the same
> with Plasma Cleaner? Is the same?I have a very simple Plasma with maximum
> 20W. )
> - Put the master in a desiccator with 100microliters of
> Trichloro(1H,1H,2H,2H-perfluorooctyl)silane during 1 hour with simple
> vaccum .
> - NIL process: put the master and above I put the PMMA sheet with one
> Teflon sheet and 3 aluminium sheets.
> During 10 minutes with 50bar and 180ºC.
> My problem is: The 100nm are not replicated and the PMMA sticks to the
> master, and then the master gets dirty.
> Can someone helps me to improve the process?
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