MEMS-talk

News	MEMSnet Home: MEMS-Talk: What is the etch rate of SU-8 in O2 plasma? What is the etch rate of SU-8 in O2 plasma? 2003-03-07 S.O. Ryu What is the best first layer for the multi-layer process? 2003-03-07 Park, Sang Won (Daniel) 2003-03-07 [email protected] 2003-03-10 Isaac Wing Tak Chan 2003-03-13 Greg Reimann 2003-03-13 Christopher F. Blanford 2003-03-14 Isaac Wing Tak Chan 2003-03-13 Isaac Wing Tak Chan 2003-03-12 [email protected] 2003-03-13 Isaac Wing Tak Chan What is the etch rate of SU-8 in O2 plasma? S.O. Ryu 2003-03-07 Dear all, Does anybody know what the etch rate of SU-8 in O2 plasma is? I have patterned 4 micro-m SU-8 film and plan to etch it in O2 plasma. I wonder how much the etch rate will be. Is it possible to etch SU-8 in pure O2 plasma or do I need O2/CF4 mixture gas? I do not need fast etch rate ( may be 2~3 micro-m/hour) Thanks in advance. Jack reply
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