A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Bubbles in my SU-8
Bubbles in my SU-8
2003-03-14
frank berisford
2003-03-17
Christopher F. Blanford
2003-03-17
Jennifer Pagan
2003-03-17
Josef Kouba
2003-03-18
Mark Shaw
heat effect on MUMPS cantilever beam
2003-04-04
weiwei2
Bubbles in my SU-8
frank berisford
2003-03-14
Hello all,

I've been trying several different techniques in an attempt to minimize bubbles
in my SU-8.  At first I tried pippeting it onto my substrate using a large bore
pippette.  I also tried dispensing from a syringe and pouring straight from
the bottle.  The pouring seems to work best but I still get a sizable bubble
count.  From here I've tried sucking the bubbles out with a needle and syringe
but to no avail.

I've read of others wiping the SU-8 across the wafers but have yet to try this
method for fear of destroying the substrate.  For what it's worth I'm using
SU-8 2035 with a target thickness of 50microns but I think I've got my spin
recipe locked down.

Thanks for  your time,
Frank Berisford




reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
University Wafer
Addison Engineering
Mentor Graphics Corporation
Harrick Plasma, Inc.