i fabricated some cantilevers 500um-1000um long using MUMPS. (curled bimorgh
cantilever ---> gold ontop of poly2)

i die attach the entire die + wire bond it

during die attach, i use thermal cure epoxy which is treated at 150C. i
tried vary time from 1 hour to 1.5 hour

all my cantilever experienced "extra curling" after die attach. How to solve
this? Any paper which explain or model this problem? how to take into
account the extra curling in my design + modeling?

Leow
Universiti Teknologi Malaysia
Malaysia