Mark
EVG has just come out with a system to measure this.
Shay kaplan
-----Original Message-----
From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org]On
Behalf Of Mark van der Heijden
Sent: Wednesday, March 19, 2003 3:32 PM
To: mems-talk@memsnet.org
Subject: [mems-talk] Overlay between front and back of wafer
Hi All,
Does anyone know of a method/device to measure which i can use to measure
the overlay between structures on the front and the back of a wafer.
Thanks,
Mark
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