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MEMSnet Home: MEMS-Talk: Overlay between front and back of wafer
Overlay between front and back of wafer
2003-03-19
Mark van der Heijden
2003-03-19
Roger Brennan
2003-03-19
Luesebrink Helge
2003-03-19
Shay Kaplan
2003-03-19
Brubaker Chad
2003-03-20
Phillipe Tabada
Overlay between front and back of wafer
Phillipe Tabada
2003-03-20
Hi Mark,

   If a Carl Suss MA6 contact mask aligner is available to you, you can use
its backside alignment capabilities to measure overlay between front and
backside of the wafer.

Phil






>From: "Mark van der Heijden" 
>Reply-To: General MEMS discussion 
>To: mems-talk@memsnet.org
>Subject: [mems-talk] Overlay between front and back of wafer
>Date: Wed, 19 Mar 2003 13:31:56 +0000
>
>
>Hi All,
>
>Does anyone know of a method/device to measure which i can use to measure
>the overlay between structures on the front and the back of a wafer.
>
>Thanks,
>Mark
>
>
>
>
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