I remember asking this question about a year ago. Unfortuneately, I can not
bring up the messages I received from that inquiry. Here is what I
remember:
Suss and the E-Group both offer instruments to check front-to-back alignment
Both are expensive -- about 80K USD.
Also, Avi.Laker@teccor.com had done some work on having a custom system
built.
Good Luck,
Roger Brennan
8710 Gardners School Road (soon to be Tyson Farm Road)
Stantonsburg, NC 27883
(252) 238-3377
rogerbr@earthlink.net
-----Original Message-----
From: mems-talk-bounces@memsnet.org
[mailto:mems-talk-bounces@memsnet.org]On Behalf Of Mark van der Heijden
Sent: Wednesday, March 19, 2003 8:32 AM
To: mems-talk@memsnet.org
Subject: [mems-talk] Overlay between front and back of wafer
Hi All,
Does anyone know of a method/device to measure which i can use to measure
the overlay between structures on the front and the back of a wafer.
Thanks,
Mark
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