I remember asking this question about a year ago.  Unfortuneately, I can not
bring up the messages I received from that inquiry.  Here is what I
remember:

Suss and the E-Group both offer instruments to check front-to-back alignment
Both are expensive -- about 80K USD.

Also, [email protected] had done some work on having a custom system
built.

Good Luck,

Roger Brennan
8710 Gardners School Road (soon to be Tyson Farm Road)
Stantonsburg, NC 27883
(252) 238-3377
[email protected]



-----Original Message-----
From: [email protected]
[mailto:[email protected]]On Behalf Of Mark van der Heijden
Sent: Wednesday, March 19, 2003 8:32 AM
To: [email protected]
Subject: [mems-talk] Overlay between front and back of wafer



Hi All,

Does anyone know of a method/device to measure which i can use to measure
the overlay between structures on the front and the back of a wafer.

Thanks,
Mark




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